Annual Report 2003

• Nanostructures Laboratory - (html - pdf)

• Scanning-Electron-Beam Lithography- (html - pdf)

• Spatial-Phase-Locked Electron-Beam Lithography- (html - pdf)

• X-Ray Nanolithography- (html - pdf)

• Adaptive-Membrane-Mask Technology- (html - pdf)

• Nanometer-level Feedback-Stabilized Interferometric Aligning and Gapping in an X-ray Lithographic System- (html - pdf)

• Zone-Plate-Array Lithography (ZPAL): The System- (html - pdf)

• Zone-Plate-Array Lithography (ZPAL): Lithographic Performance- (html - pdf)

• Fabricating Advanced Microsystems with Conformable-Contact Photolithography- (html - pdf)

• Interference Lithography- (html - pdf)

• The MIT Nanoruler: A Tool for Patterning Nano-Accurate Gratings- (html - pdf)

• Interference Lithography for Patterning Variable-Period Gratings- (html - pdf)

• Precision Fabrication Techniques for Microphotonic Devices- (html - pdf)

• Fabrication of 3-D Photonic Bandgap Structures- (html - pdf)

• Enhanced Extraction from a Light-Emitting Diode Modified by a Photonic Crystal and Lasing Action- (html - pdf)

• Design and Fabrication of a Superprism Using Two Dimensional Photonic Crystals- (html - pdf)

• Coupling into Photonic Crystal Waveguides- (html - pdf)

• Development of birefringence-free ridge waveguides for waveguide isolators- (html - pdf)

• Nanomagnets and Magnetic random access memories- (html - pdf)

• Templated Self-Assembly- (html - pdf)

• Block Copolymer Lithography- (html - pdf)

• Transmission Gratings for X-ray and Atom-Beam Spectroscopy and Interferometry- (html - pdf)

• Nanofabricated Metal Transmission Gratings- (html - pdf)

• Nanofabricated Reflection Gratings - (html - pdf)

• X-ray Foil Optics Shaping Technology- (html - pdf)

• Nano-Accurate Assembly Technology for X-ray Foil Optics- (html - pdf)

• Functional 3D Nanostructures achieved via Folding of 2D Membranes- (html - pdf)

• Strain-tunable Photonic Band Gap Microcavity Waveguides at 1.55 um - (html - pdf)

• Journal Articles - (html - pdf)