Journal Articles

JA-1. H.I. Smith and M.S. Gussenhoven, "Adhesion of Polished Quartz Crystals under Ultrahigh Vacuum", J. Appl. Phys. 36, 2326-2327 (1965).

JA-2. H.I. Smith, "Optical-Contact Bonding", J. Acoust. Soc. Amer. 37, 928-929 (1965).

JA-3. H. Van de Vaart and H.I. Smith, "High Efficiency Polarization Reversal of Magnetoelastic Waves in YIG by Optical-Contact Bonding of YAG Disks", Appl. Phys. Lett. 9, 439-441 (1966).

JA-4. H.I. Smith and A.B. Smith, "Transmission of Gigahertz Ultrasonic Waves through Optical-Contact Bonds at Room Temperature", J. Acoust. Soc. Amer. 44, 1737-1738 (1968).

JA-5. H.I. Smith, "Methods for Fabricating High Frequency Surface Wave Transducers", Rev. Sci. Inst. 40, 729-730 (1969).

JA-6. H.I. Smith, "The Physics and Technology of Surface Elastic Waves", International Journal of Nondestructive Testing 2, 31-59 (1970).

JA-7. B.E. Burke, A. Bers, H.I. Smith, R.A. Cohen, and R.W. Mountain, "Acoustic Surface Wave Amplification using an Accumuation Layer on Silicon", Proc. IEEE 58, 1775-1776 (1970).

JA-8. H.I. Smith, F.J. Bachner, and N. Efremow, "A High-Yield Photolithographic Technique for Surface Wave Devices", J. Electrochem. Soc. 118, 821-825 (1971).

JA-9. D.L. Spears and H.I. Smith, "High-Resolution Pattern Replication using Soft X-rays", Electronics Lett. 8, 102-104 (1972).

JA-10. D.L. Spears and H.I. Smith, "X-ray Lithography: A New High Resolution Replication Process", Solid State Technol. 15, No. 7, 21-26 (1972).

JA-11. R.C. Williamson and H.I. Smith, "Large-Time-Bandwidth-Product Surface-Wave Pulse Compressor Employing Reflective Gratings", Electronics Lett. 8, No. 16, 401-402 (1972).

JA-12. R.C. Williamson and H.I. Smith, "The use of Surface-Elastic-Wave Reflection Gratings in Large Time-Bandwidth Pulse-Compression Filters", IEEE Trans. Microwave Theory and Techniques MTT-21, 195-205 (1973).

JA-13. H.I. Smith, D.L. Spears, and S.E. Bernacki, "X-ray Lithography: A Complementary Technique to Electron Beam Lithography", J. Vac. Sci. Technol. 10, 913-917 (1973).

JA-14. R.J. Hawryluk, A.M. Hawryluk, and H.I. Smith, "Energy Dissipation in a Thin Polymer Film by Electron Beam Scattering", J. Appl. Phys. 45, 2551-2556 (1974).

JA-15. H.I. Smith, "Fabrication Techniques for Surface-Acoustic Wave and Thin-Film Optical Devices", Proc. IEEE 62, 1361-1387 (1974).

JA-16. H.I. Smith, "Electron Beam, X-ray, and Optical Techniques for Fabricating Surface-Acoustic-Wave and Thin-Film Optical Devices", LeVide 29, No. 173, 364-370 (1974).

JA-17. H.I. Smith, N. Efremow, and P.L. Kelly, "Photolithographic Contact Printing of 4000Å Linewidth Patterns", J. Electrochem. Soc. 121, 1503-1506 (1974).

JA-18. R.J. Hawryluk, H.I. Smith, A. Soares, and A.M. Hawryluk, "Energy Dissipation in a Thin Polymer Film by Electron Beam Scattering-Experiment", J. Appl. Phys. 46, 2528-2537 (1975).

JA-19. S.E. Bernacki and H.I. Smith, "Fabrication of Silicon MOS Devices using X-ray Lithography", IEEE Trans. Elec. Dev. ED22, 421-428 (1975).

JA-20. J. Melngailis, H.I. Smith, and N. Efremow, "Instrumentation for Conformable Photomask Lithography", IEEE Trans. Elec. Dev. ED22, 496-498 (1975).

JA-21. H.I. Smith, S.R. Chinn, and P.D. DeGraff, "Application of Moiré Techniques in Scanning Electron Beam Lithography and Microscopy", J. Vac. Sci. Technol. 12, 1262-1265 (1975).

JA-22. H.I. Smith and S.E. Bernacki, "Prospects for X-ray Fabrication of Silicon IC Devices", J. Vac. Sci. Technol. 12, 1321-1323 (1975).

JA-23. S.E. Bernacki and H.I. Smith, "Fabrication of Silicon MOS Devices using X-ray Lithography", (in Japanese), Nikkei Electronics 1-12, 139-157 (1976).

JA-24. H.I. Smith and D.C. Flanders, "X-ray Lithography", Japan J. Appl. Phys. 16, Supplement 16‑1, 61-65 (1977).

JA-25. D.C. Flanders, H.I. Smith, and S. Austin, "A New Interferometric Alignment Technique", Appl. Phys. Lett. 31, 426-428 (1977).

JA-26. D.C. Flanders, H.I. Smith, H.W. Lehmann, R. Widmer, and D.C. Shaver, "Surface Relief Structures with Linewidths Below 2000Å", Appl. Phys. Lett. 32, 112-114 (1978).

JA-27. N.M. Ceglio and H.I. Smith, "Micro Fresnel Zone Plates for Coded Imaging Applications", Rev. Sci. Instr. 49, 15-20 (1978).

JA-28. H.I. Smith and D.C. Flanders, "Oriented Crystal Growth on Amorphous Substrates using Artificial Surface-Relief Gratings", Appl. Phys. Lett. 32, 349-350 (1978).

JA-29. D.C. Flanders, D.C. Shaver, and H.I. Smith, "Alignment of Liquid Crystals using Submicrometer Periodicity Gratings", Appl. Phys. Lett. 32, 597-598 (1978).

JA-30. S. Austin, H.I. Smith, and D.C. Flanders, "Alignment of X-ray Lithography Masks using a New Interferometric Technique - Experimental Results", J. Vac. Sci. Technol. 15, 984 (1978).

JA-31. D.C. Flanders and H.I. Smith, "Polyimide Membrane X-ray Lithography Masks - Fabrication and Distortion Measurements", J. Vac. Sci. Technol. 15, 995-997 (1978).

JA-32. D.C. Flanders and H.I. Smith, "Surface Relief Gratings of 3200Å-Period-Fabrication and Influence on Thin-Film Growth", J. Vac. Sci. Technol. 15, 1001 (1978).

JA-33. M.W. Geis, D.C. Flanders, and H.I. Smith, "Crystallographic Orientation of Silicon on an Amorphous Substrate using an Artificial Surface-Relief Grating and Laser Crystallization", Appl. Phys. Lett. 35, 71 (1979).

JA-34. J. Melngailis, H.A. Haus, and A. Lattes, "Efficient Conversion of Surface Acoustic Waves in Shallow Gratings to Bulk Plate Modes", Appl. Phys. Lett. 35, 324 (1979).

JA-35. D.C. Shaver, D.C. Flanders, N.M. Ceglio, and H.I. Smith, "X-ray Zone Plates Fabricated using Electron-Beam and X-ray Lithography", J. Vac. Sci. Technol. 16, 1626 (1979).

JA-36. M.W. Geis, D.C. Flanders, H.I. Smith, and D.A. Antoniadis, "Graphoepitaxy of Silicon on Fused Silica using Surface Micropatterns and Laser Crystallization", J. Vac. Sci. Technol. 16, 1640 (1979).

JA-37. D.C. Flanders, A.M. Hawryluk, and H.I. Smith, "Spatial-Period-Division - A New Technique for Exposing Submicrometer-Linewidth Periodic and Quasi-Periodic Patterns", J. Vac. Sci. Technol. 16, 1949 (1979).

JA-38. H.I. Smith and D.C. Flanders, "X-ray Lithography - A Review and Assessment of Future Applications", J. Vac. Sci. Technol. 17, 533 (1980).

JA-39. M.W. Geis, D.A. Antoniadis, D.J. Silversmith, R.W. Mountain, and H.I. Smith, "Silicon Graphoepitaxy using a Strip-Heater Oven", Appl. Phys. Lett. 37, 454 (1980).

JA-40. H.A. Haus, A. Lattes, and J. Melngailis, "Grating Coupling Between Surface Acoustic Waves and Plate Modes", IEEE Trans. Sonics and Ultrasonics SU27, 258 September 1980.

JA-41. H.V. Kanel and J.D. Litster, "Light Scattering Studies on Single-Layer Smectic p‑Butoxybenzilidene p-Octylaniline", Phys. Rev. A 23, 3251 (1981).

JA-42. M.W. Geis, D.A. Antoniadis, D.J. Silversmith, R.W. Mountain, and H.I. Smith, "Silicon Graphoepitaxy", J. Vac. Sci. Technol. 18, 229 (1981).

JA-43. H.V. Kanel, J.D. Litster, J. Melngailis, and H.I. Smith, "Alignment of Nematic Butoxybenzilidene Octylaniline by Surface Relief Gratings", Phys. Rev. A 24, 2713 (l98l).

JA-44. N.M. Ceglio, C.F. Stone, and A.M. Hawryluk, "Microstructures for High Energy X-ray and Particle Imaging Applications", J. Vac. Sci. Technol. 19, 886 (1981).

JA-45. A.M. Hawryluk, N.M. Ceglio, R.H. Price, J. Melngailis, and H.I. Smith, "Gold Transmission Gratings with Submicrometer Periods and Thicknesses > 0.5 µm", J. Vac. Sci. Technol. 19, 897 (1981).

JA-46. N. Tsumita, J. Melngailis, A.M. Hawryluk, and H.I. Smith, "Fabrication of X-ray Masks using Anisotropic Etching of (110) Si and Shadowing Techniques", J. Vac. Sci. Technol. 19, 1211 (1981).

JA-47. N.N. Efremow, N.P. Economou, K. Bezjian, S.S. Dana, and H.I. Smith, "A Simple Technique for Modifying the Profile of Resist Exposed by Holographic Lithography", J. Vac. Sci. Technol. 19, 1234 (1981).

JA-48. C.M. Horowitz and J. Melngailis, "Reactive Sputter Etching of Si, SiO2, Cr, Al, and Other Materials with Gas Mixtures Based on CF4 and Cl2", J. Vac. Sci. Technol. 19, 1408 (1981).

JA-49. P.F. Liao, J.G. Bergman, D.S. Chemla, A. Wokaun, J. Melngailis, A.M. Hawryluk, and N.P. Economou, "Surface Enhanced Raman Scattering from Microlithographic Silver Particle Surfaces", Chem. Phys. Lett. 82, (2), 355 (1981).

JA-50. C.M. Horwitz, "Reactive Sputter Etching of Silicon with Very Low Mask-Material Etch Rates", IEEE Trans. Elect. Devices ED28, 1320 (198l).

JA-51. M.W. Geis, H.I. Smith, B.-Y. Tsaur, J.C.C. Fan, E.W. Maby, and D.A. Antoniadis, "Zone-Melting Recrystallization of Encapsulated Silicon Films on SiO2- Morphology and Crystallography", Appl. Phys. Lett. 40, 158 (1982).

JA-52. R.J. Hawryluk, A.M. Hawryluk, and H.I. Smith, "Addendum: New Model of Electron Free Path in Multiple Layers for Monte Carlo Simulation", J. Appl. Phys. 53, 5985 (1982).

JA-53. K.A. Bezjian, H.I. Smith, J.M. Carter, and M.W. Geis, "An Etch Pit Technique for Analyzing Crystallographic Orientation in Si Films", J. Electrochem. Soc. 129, 1848 (1982).

JA-54. A.M. Hawryluk, H.I. Smith, R.M. Osgood, and D.J. Ehrlich, "Deep-UV Spatial Period Division using An Excimer Laser", Optics Letters 7, 402 (1982).

JA-55. M.W. Geis, H.I. Smith, B.-Y. Tsaur, J.C.C. Fan, D.J. Silversmith, and R.W. Mountain, "Zone Melting Recrystallization of Si Films with a Movable-Strip-Heater Oven", J. Electrochem. Soc. 129, 2812 (1982).

JA-56. H.A. Atwater, H.I. Smith, and M.W. Geis, "Orientation Selection by Zone-Melting Silicon Films through Planar Constrictions", Appl. Phys. Lett. 41, 747 (1982).

JA-57. N.M. Ceglio, A.M. Hawryluk, and R.H. Price, "Imaging X-ray Spectrometer for Laser Fusion Applications", Appl. Opt. 21, 3953-3960 (1981).

JA-58. M.W. Geis, H.I. Smith, D.J. Silversmith, R.W. Mountain, and C.V. Thompson, "Solidification-Front Modulation to Entrain Subboundaries in Zone Melting Recrystallization of Si on SiO2", J. Electrochem. Soc. 130, 1178 (1983).

JA-59. C.M. Horwitz, "New Dry Etch for Al and Al-Cu-Si Alloy: Reactively Masked Sputter Etching with SiF4", Appl. Phys. Lett. 42, 898 (1983).

JA-60. E.W. Maby, H.A. Atwater, A.L. Keigler, and N.M. Johnson, "Electron-Beam-Induced Current Measurements in Silicon-on-Insulator Films Prepared by Zone-Melting Recrystallization", Appl. Phys. Lett. 43, 482 (1983).

JA-61. C.M. Horwitz, "RF Sputtering-Voltage Division Between Two Electrodes", J. Vac. Sci. Technol. A 1, 60 (1983).

JA-62. H.I. Smith, C.V. Thompson, M.W. Geis, R.A. Lemons, and M.A. Bosch, "The Mechanism of Orientation in Si Graphoepitaxy by Laser or Strip-Heater Recrystallization", J. Electrochem. Soc. 130, 2050 (1983).

JA-63. H.I. Smith, M.W. Geis, C.V. Thompson, and H.A. Atwater, "Silicon-on-Insulator by Graphoepitaxy and Zone-Melting Recrystallization of Patterned Films", J. Crystal Growth, 63, 527 (1983).

JA-64. C.M. Horwitz, "Hollow Cathode Reactive Sputter Etching - A New High-Rate Process", Appl. Phys. Lett. 43, 977 (1983).

JA-65. E.H. Anderson, C.M. Horwitz, and H.I. Smith, "Holographic Lithography with Thick Photoresist", Appl. Phys. Lett. 43, 874 (1983).

JA-66. A.M. Hawryluk, H.I. Smith, and D.J. Ehrlich, "Deep UV Spatial-Frequency Doubling by Combining Multilayer Mirrors with Diffraction Gratings", J. Vac. Sci. Technol. B 1, 1200 (1983).

JA-67. H.J. Lezec, E.H. Anderson, and H.I. Smith, "An Improved Technique for Resist-Profile Control in Holographic Lithography", J. Vac. Sci. Technol. B 1, 1204 (1983).

JA-68. N.M. Ceglio, A.M. Hawryluk, and M.L. Schattenburg, "X-ray Phase Lens Design and Fabrication", J. Vac. Sci. Technol. B 1, 1285 (1983).

JA-69. H.A. Atwater, C.V. Thompson, H.I. Smith, and M.W. Geis, "Orientation Filtering by Growth-Velocity Competition in Zone-Melting Recrystallization of Silicon on SiO2", Appl. Phys. Lett. 43, 1126 (1983).

JA-70. C.M. Horwitz, "Radio Frequency Sputtering - The Significance of Power Input", J. Vac. Sci. Technol. A 1, 1795 (1983).

JA-71. H.I. Smith, C.V. Thompson, and H.A. Atwater, "Graphoepitaxy and Zone-Melting Recrystallization of Patterned Films", J. Cryst. Growth 65, 337 (1983).

JA-72. C.J. Keavney and H.I. Smith, "A 3.8 µm Period Sawtooth Grating in InP by Anisotropic Etching", J. Electrochem. Soc. 131, 452 (1984).

JA-73. R.F. Kwasnick, M.A. Kastner, J. Melngailis, and P.A. Lee, "Non-Monotonic Variations of the Conductance with Electron Density in ~70 nm Wide Inversion Layers", Phys. Rev. Lett. 52, 224 (1984).

JA-74. C.V. Thompson and H.I. Smith, "Surface-Energy-Driven Secondary Grain Growth in Ultrathin (<100 nm) Films of Silicon", Appl. Phys. Lett. 44, 603 (1984).

JA-75. H.A. Atwater, H.I. Smith, C.V. Thompson, and M.W. Geis, "Zone-Melting Recrystallization of Thick Silicon on Insulator Films", Mater. Lett. 2, 269 (1984).

JA-76. T. Yonehara, H.I. Smith, C.V. Thompson, and J.E. Palmer, "Graphoepitaxy of Ge on SiO2 by Solid-State Surface-Energy-Driven Grain Growth", Appl. Phys. Lett. 45, 631 (1984).

JA-77. M.L. Schattenburg, I. Plotnik, and H.I. Smith, "Reactive-Ion Etching of 0.2 µm Period Gratings in Tungsten and Molybdenum using CBrF3", J. Vac. Sci. Technol. B 3, 272 (1985).

JA-78. A.C. Warren, D.A. Antoniadis, H.I. Smith, and J. Melngailis, "Surface Superlattice Formation in Silicon Inversion Layers using 0.2 µm-Period Grating-Gate Electrodes", IEEE Elect. Dev. Lett. EDL-6, 294 (1985).

JA-79. G.G. Shahidi, E.P. Ippen, and J. Melngailis, "Submicron-Gap High-Mobility Silicon Picosecond Photodetectors", Appl. Phys. 58, 763 (1985).

JA-80. C.V. Thompson, "Secondary Grain Growth in Thin Films of Semiconductors: Theoretical Aspects", J. Appl. Phys. 58, 763 (1985).

JA-81. S.Y. Chou, H.I. Smith, and D.A. Antoniadis, "X-ray Lithography for Sub-100 nm Channel Length Transistors using Masks Fabricated with Conventional Photolithography, Anisotropic Etching and Oblique Shadowing", J. Vac. Sci. Technol. B 3, 1587 (1985).

JA-82. J.C. Licini, D.J. Bishop, M.A. Kastner, and J. Melngailis, "Aperiodic Magnetoresistance Oscillations in Narrow Inversion Layers in Si", Phy. Dev. Lett. 55, 2987 (1985).

JA-83. S.Y. Chou, D.A. Antoniadis, and H.I. Smith, "Observation of Electron Velocity Overshoot in Sub-100 nm-Channel MOSFETs in Si", IEEE Elect. Dev. Lett. EDL-6, 665 (1985).

JA-84. H.I. Smith, "A Statistical Analysis of UV, X-ray and Charged-Particle Lithographies", J. Vac. Sci. Technol. B 4, 148 (1986).

JA-85. S.Y. Chou, H.I. Smith, and D.A. Antoniadis, "Sub-100 nm Channel-Length Transistors Fabricated using X-ray Lithography", J. Vac. Sci. Technol. B 4, 253 (1986).

JA-86. A.C. Warren, I. Plotnik, E.H. Anderson, M.L. Schattenburg, D.A. Antoniadis, and H.I. Smith, "Fabrication of Sub-100 nm Linewidth Periodic Structures for Study of Quantum Effects from Interference and Confinement in Si Inversion Layers", J. Vac. Sci. Technol. B 4, 365 (1986).

JA-87. C.C. Wong, H.I. Smith, and C.V. Thompson "Surface-Energy-Driven Secondary Grain Growth in Thin Au Films", Appl. Phys. Lett. 48, 335 (1986).

JA-88. H.-J. Kim, C.V. Thompson, "Compensation of Grain Growth Enhancement in Doped Silicon Films", Appl. Phys. Lett. 48, 399 (1986).

JA-89. A.C. Warren, D.A. Antoniadis, and H.I. Smith, "Quasi One-Dimensional Conduction in Multiple, Parallel Inversion Lines", Phys. Rev. Lett. 56, 1858 (1986).

JA-90. S.Y. Chou and D.A. Antoniadis "Relationship Between Measured and Intrinsic Transconductances of FETs", IEEE Trans. Electron Devices ED-34, 448 (1987).

JA-91. M.W. Geis, H.I. Smith, and C.K. Chen, "Characterization and Entrainment of Subboundaries and Defect Trails in Zone-Melting-Recrystallized Si Films", J. Appl. Phys. 60, 1152 (1986).

JA-92. H.I. Smith, "A Review of Submicron Lithography", Superlattices and Microstructures 2, 129 (1986).

JA-93. A.C. Warren, D.A. Antoniadis, and H.I. Smith, "Semi-Classical Calculation of Charge Distributions in Ultra-Narrow Inversion Lines", IEEE Electron Device Letters EDL-7, 413 (1986).

JA-94. S.Y. Chou, D.A. Antoniadis, and H.I. Smith, "Application of the Shubnikov-de Haas Oscillations in Characterization of Si MOSFET's and GaAs MODFET's", IEEE Trans. Elec. Dev. ED-34, 883 (1987).

JA-95. C.R. Canizares, H.V.D. Bradt, G.W. Clark, A.C. Fabian, P.C. Joss, A.M. Levine, W.H.G. Lewin, T.H. Market, W. Mayer, J.E. McClintock, S.A. Rappaport, G.R. Ricker, M.L. Schattenburg, H.I. Smith, and B.E. Woodgate, "The MIT Spectroscopy Investigation on AXAF and the Study of Supernova Remnants", Astro. Lett. and Communications 26, 87 (1987).

JA-96. S.M. Garrison, R.C. Cammarata, C.V. Thompson, and H. I. Smith, "Surface-Energy-Driven Grain Growth during Rapid Thermal Annealing (< 10s) of Thin Silicon Films", J. Appl. Phys. 61, 1652 (1987).

JA-97. S.Y. Chou, D.A. Antoniadis, H.I. Smith, and M.A. Kastner, "Conductance Fluctuations in Ultra-Short-Channel Si MOSFETs", Solid State Communications 61, 571 (1987).

JA-98. M.A. Kastner, R.F. Kwasnick, J.C. Licini, and D.J. Bishop, "Conductance Fluctuations Near the Localized-to-Extended Transition in Narrow Si MOSFETs", Phys. Rev. B 36, 8015 (1987).

JA-99. J.S. Im, H. Tomita, and C.V.Thompson, "Cellular and Dendritic Morphologies on Stationary and Moving Liquid-Solid Interfaces in Zone-Melting Recrystallization", Appl. Phys. Lett. 51, 685 (1987).

JA-100. J. Palmer, C.V. Thompson, and H.I. Smith, "Grain Growth and Grain Size Distribution in Thin Germanium Films", J. Appl. Phys. 62, 2492 (1987).

JA-101. G.G. Shahidi, D.A. Antoniadis, and H.I. Smith, "Observation of Electron Velocity Overshoot at Room and Liquid Nitrogen Temperatures in Silicon Inversion Layers", IEEE Elect. Dev. Lett. EDL-9, 94 (1988).

JA-102. H.A. Atwater, C.V. Thompson, and H.I. Smith, "Interface-Limited Grain Boundary Motion during Ion Bombardment", Phys. Rev. Lett. 60, 112 (1988).

JA-103. G.G. Shahidi, D.A. Antoniadis, and H.I. Smith, "Electron Velocity Overshoot in Sub-100 nm Channel Length MOSFETs at 77K and 300K", J. Vac. Sci. Technol. B 6, 137 (1988).

JA-104. H.I. Smith, "A Model for Comparing Process Latitude in Ultraviolet, Deep-Ultraviolet and X-ray Lithography", J. Vac. Sci. Technol. B 6, 346-349 (1988).

JA-105. E.H. Anderson, K. Komatsu, and H.I. Smith, "Achromatic Holographic Lithography in the Deep UV", J. Vac. Sci. Technol. B 6, 216 (1988).

JA-106. Y.-C. Ku, E.H. Anderson, M.L. Schattenburg, and H.I. Smith, "Use of a Pi-Phase-Shifting X‑ray Mask to Increase the Intensity Slope at Feature Edges", J. Vac. Sci. Technol. B 6, 150 (1988).

JA-107. G.G. Shahidi, D.A. Antoniadis, and H.I. Smith, "Reduction of Channel-Hot-Electron-Generated Substrate Current in Sub-150 nm Channel Length Si MOSFETs", IEEE Elect. Dev. Lett. EDL-9, 497 (1988).

JA-108. K. Ismail, W. Chu, D.A. Antoniadis, and H.I. Smith, "Surface-Superlattice Effects in a Grating-Gate GaAs/GaA1As Modulation-Doped Field-Effect Transistor", Appl. Phys. Lett. 52, 1071 (1988).

JA-109. M.A. Kastner, S.B. Field, J.C. Licini, and S.L.Park, "Anomalous Magnetoresistance of the Electron Gas in a Restricted Geometry", Phys. Rev. Lett. 60, 2535 (1988).

JA-110. E.H. Anderson, A.M. Levine, and M.L. Schattenburg, "Transmission X-ray Diffraction Grating Alignment using a Photoelastic Modulator", Appl. Opt. Lett. 27, 3522 (1988).

JA-111. H.A. Atwater, C.V. Thompson, and H.I. Smith, "Ion Bombardment Enhanced Grain Growth in Germanium, Silicon and Gold Thin Films", J. Appl. Phys. 64, 2337 (1988).

JA-112. H.A. Atwater, C.V. Thompson, and H.I. Smith, "Mechanisms for Crystallographic Orientation in the Crystallization of Thin Silicon Films from the Melt", J. Mat. Res. 3, 1232 (1988).

JA-113. D.W. Keith, M.L. Schattenburg, H.I. Smith, and D.E. Pritchard, "Diffraction of Atoms by a Transmission Grating", Phys. Rev. Lett. 61, 1580-1583 (1988).

JA-114. H.A. Atwater and C.V. Thompson, "Point Defect Enhanced Grain Growth in Silicon Thin Films: The Role of Ion Bombardment and Dopants", Appl. Phys. Lett. 53, 2155 (1988).

JA-115. C. Ortiz, K.A. Rubin, and S. Ajuria, "Laser-Induced Multi- Crystallization Events of Thin Germanium Films", J. Mat. Res. 3, 1196 (1988).

JA-116. K. Ismail, W. Chu, D.A. Antoniadis, and H.I. Smith, "Lateral-Surface Superlattice and Quasi-One-Dimensional GaAs/GaAlAs MODFETs Fabricated using X-ray and Deep-UV Lithography", J. Vac. Sci. Technol. B 6, 1824 (1988).

JA-117. J.H.F. Scott-Thomas, M.A. Kastner, D.A. Antoniadis, H.I. Smith, and S. Field, "Si MOSFETs with 70 nm Slotted Gates for Study of Quasi-One-Dimensional Quantum Transport", J. Vac. Sci. Technol. B 6, 1841 (1988).

JA-118. JA-118 Y.C. Ku, H.I. Smith,and I. Plotnik, "Use of Ion Implantation to Eliminate Stress-Induced Distortion in X-ray Masks", J. Vac. Sci. Technol. B 6, 2174 (1988).

JA-119. U. Meirav, M. Heiblum, and F. Stern, "High-Mobility Variable-Density Two-Dimensional Electron Gas in Inverted GaAs-AlGaAs Heterojunctions", Appl. Phys. Lett. 52, 460-462 (1988).]

JA-120. K. Ismail, W. Chu, A. Yen, D.A. Antoniadis and H.I. Smith, "Negative Transconductance and Negative Differential Resistance in a Grid-Gate Modulation-Doped Field-Effect Transistor", Appl. Phys. Lett. 54, 460 (1989).

JA-121. K. Ismail, D.A. Antoniadis, and H.I. Smith, "One-Dimensional Subbands and Mobility Modulation in GaAs/AlGaAs Quantum Wires", Appl. Phys. Lett. 54, 1130 (1989).

JA-122. J.H.F. Scott-Thomas, S.B. Field, M.A. Kastner, H.I. Smith, and D.A. Antoniadis, "Conductance Oscillations Periodic in the Density of a One-Dimensional Electron Gas", Phys. Rev. Lett. 62, 583 (1989).

JA-123. P.F. Bagwell and T.P. Orlando, "Landauer's Conductance Formula and its Generalization to Finite Voltages", Phys. Rev. B 40, 1456 (1989).

JA-124. P.F. Bagwell and T.P. Orlando, "Broadened Conductivity Tensor and Density of States for a Superlattice Potential in 1, 2, and 3 Dimensions", Phys. Rev. B 40, 3735 (1989).

JA-125. C.T. Liu, K. Nakamura, D.C. Tsui, K. Ismail, D.A. Antoniadis, and H.I. Smith, "Magneto-Optics of a Quasi Zero-Dimensional Electron Gas", Appl. Phy. Lett. 55, 168 (1989).

JA-126. K. Ismail, D.A. Antoniadis, and H.I. Smith, "Lateral Resonant Tunneling in a Double-Barrier Field-Effect Transistor", Appl. Phys. Lett. 55, 589 (1989).

JA-127. [U. Meirav, M.A. Kastner, M. Heiblum, and S.J. Wind, "One-Dimensional Electron Gas in GaAs: Periodic Conductance Oscillations as a Function of Density", Phys. Rev. B 40, 5871 (1989).]

JA-128. W. Chu, A. Yen, K. Ismail, M.I. Shepard, H.J. Lezec, C.R. Musil, J. Melngailis, Y.-C. Ku, J.M. Carter, and H.I. Smith, "Sub-100 nm X-ray Mask Technology using Focused-Ion-Beam Lithography", J. Vac. Sci. Technol. B 7, 1583-1585 (1989).

JA-129. A. Moel, M.L. Schattenburg, J.M. Carter, and H.I. Smith, "Microgap Control in X-ray Nanolithography", J. Vac. Sci. Technol. B 7, 1692-1695 (1989).

JA-130. K. Ismail, W. Chu, R. Tiberio, A. Yen, H.J. Lezec, M.I. Shepard, C.R. Musil, J. Melngailis, D.A. Antoniadis, and H.I. Smith, "Resonant Tunneling Across and Mobility Modulation Along Surface-Structured Quantum Wells", J. Vac. Sci. Technol. B 7, 2025-2029 (1989).

JA-131. K. Ismail, D.A. Antoniadis, H.I. Smith, C.T. Liu, K. Nakamura, and D.C. Tsui, "A Lateral-Surface Superlattice Structure on GaAs/AlGaAs for Far-Infrared and Magneto-Capacitance Measurements", J. Vac. Sci. Technol. B 7, 2000-2002 (1989).

JA-132 K. Ismail, T.P. Smith, III, W.T. Masselink and H. I. Smith, "Magnetic Flux Commensurability in Coupled Quantum Dots", Appl. Phys. Lett. 55, 276 (1989).

JA-132A A. Kumar, S.E. Laux, and F. Stern, "Channel Sensitivity to Gate Roughness in a Split-gate GaAs-AlGaAs Heterostructure", Appl. Phys. Lett. 54, 1270 (1989).

JA-133. C.T. Liu, K. Nakamura, D.C. Tsui, K. Ismail, D.A. Antoniadis, and H.I. Smith, "Far-Infrared Transmission Measurements on Grid-Gate GaAs/AlGaAs Lateral-Surface-Superlattice Structures", J. Surface Science 228, 527 (1990).

JA-134. C.T. Liu, D.C. Tsui, M. Shayegan, K. Ismail, D.A. Antoniadis, and H.I. Smith, "Oscillatory Density-of-States of Landau Bands in a Two-Dimensional Lateral Surface Superlattice", Solid State Communications 75, 395-399 (1990).

JA-135. C.V. Thompson, J. Floro, and H.I. Smith, "Epitaxial Grain Growth in Thin Metal Films", J. Appl. Phys. 67, 4099-4104 (1990).

JA-136. M.L. Schattenburg, E.H. Anderson, and H.I. Smith, "X-ray/VUV Transmission Gratings for Astrophysical and Laboratory Applications", Physica Scripta 41, 13-20 (1990).

JA-137. J.A. del Alamo and C.C. Eugster, "Quantum Field-Effect Directional Coupler", Appl. Phys. Lett. 56, 78 (1990).]

JA-138. P.F. Bagwell, "Evanescent Modes and Scattering in Quasi-One-Dimensional Wires", Phys. Rev. B 41, 354-371 (1990).

JA-139. P.F. Bagwell, "Solution of Dyson's Equation in a Quasi-One-Dimensional Wire", J. Phy. Condens. Matter 2, 6179 (1990).

JA-140. H.I. Smith and H.G. Craighead, "Nanofabrication", Physics Today pp. 24-30 February (1990).

JA-141. H.I. Smith and D.A. Antoniadis, "Seeking a Radically New Electronics", Technology Review 93, pp. 26-40 (1990).

JA-142. A. Toriumi, K. Ismail, M. Burkhardt, D.A. Antoniadis, and H.I. Smith, "Resonant Magneto-Capacitance in a Two-Dimensional Lateral-Surface Superlattice", Phys. Rev. B 41, 12346-12349 (1990).

JA-143. S.B. Field, M.A. Kastner, U. Meirav, J.H.F. Scott-Thomas, D.A. Antoniadis, H.I. Smith, and S.J. Wind, "Conductance Oscillations Periodic in the Density of One-Dimensional Electron Gases", Phys. Rev. B 42, 3523-3536 (1990).

JA-144. A. Kumar and P.F. Bagwell, "Resonant Tunneling in a Multi-Channel Wire", Solid State Communications, 75, 949-953 (1990).

JA-145. P.F. Bagwell, T.P.E. Broekaert, T.P. Orlando, and C.G. Fonstad, "Resonant Tunneling Diodes and Transistors with a One-, Two-, or Three- Dimensional Electron Emitter", J. Appl. Phys. 68, 4634-4646 (1990).

JA-146. [U. Meirav, M.A. Kastner, and S.J. Wind, "Single Electron Charging and Periodic Conductance Resonances in GaAs Nanostructures", Phys. Rev. Lett. 65, 771-774 (1990).]

JA-147. M.L. Schattenburg, K. Early, Y.C. Ku, W. Chu, M.I. Shepard, S.C. The, H.I. Smith, D.W. Peters, R.D. Frankel, D.R. Kelly, and J.P. Drumheller, "Fabrication and Testing of 0.1 µm-Linewidth Microgap X-ray Masks", J. Vac. Sci. Technol. B 8, 1604-1608 (1990).

JA-148. A. Moel, M.L. Schattenburg, J.M. Carter, and H.I. Smith, "A Compact, Low-Cost System for Sub-100 nm X-ray Lithography", J. Vac. Sci. Technol. B 8, 1648-1651 (1990).

JA-149. [C.C. Eugster, J.A. del Alamo, and M.J. Rooks, "Transport in Novel Gated Quantum Wires: The Impact of Wire Length", Japanese J. Appl. Phys. 12, L2257-L2260 (1990).]

JA-150. [A. Kumar, S.E. Laux, and F. Stern, "Electron States in a GaAs Quantum Dot in a Magnetic Field", Phys. Rev. B 42, 5166-5175 (1990).]

JA-151. K. Ismail, M. Burkhardt, H.I. Smith, N.H. Karam, and P.A. Sekula-Moise, "Patterning and Characterization of Large-Area Quantum-Wire Arrays", Appl. Phys. Lett. 58, 1539-1541 (1991).

JA-152. A. Kumar and P.F. Bagwell, "Resonant Tunneling in a Quasi-One-Dimensional Wire: Influence of Evanescent Modes", Phys. Rev. B 43, 9012-9020 (l991).

JA-153. M.W. Geis, H. I. Smith, A. Argoitia, J. Angus, G.H.M. Ma, J.T. Glass, J. Butler, C.J. Robinson, and R. Pryor, "Large-Area Mosaic Diamond Films Approaching Single-Crystal Quality", Appl. Phys. Lett. 58, 2485 (1991).

JA-154. C.T. Liu, D.C. Tsui, M. Shayegan, K. Ismail, D.A. Antoniadis, and H.I. Smith, "Guiding-Center-Drift Resonance of Two-Dimensional Electrons in a Grid-Gate Superlattice Potential", Appl. Phys. Lett. 58, 2945-2947 (1991).

JA-155. N.H. Karam, A. Mastrovita, V. Haven, K. Ismail, S. Pennycock, and H.I. Smith, "Patterning and Overgrowth of Nanostructure Quantum Well Wire Arrays by LP-MOVPE", J. Crystal Growth 107, 591-597 (1991).

JA-156. W. Chu, H.I. Smith, M.L. Schattenburg, "Replication of 50 nm Linewidth Device Patterns using Proximity X-ray Lithography at Large Gaps", Appl. Phys. Lett. 59, 1641-1643 (1991).

JA-157. K. Ismail, P.F. Bagwell, T.P. Orlando, D.A. Antoniadis, and H.I. Smith, "Quantum Phenomena in Field-Effect-Controlled Semiconductor Nanostructures", Proc. IEEE 79, 1106-1116 (1991).

JA-158. M.L. Schattenburg, C.R. Canizares, D. Dewey, K.A. Flanagan, M.A. Hamnett, A.M. Levine, K.S.K. Lum, R. Manikkalingam, T.H. Markert, and H.I. Smith, "Transmission Grating Spectroscopy and the Advanced X-ray Astrophysics Facility", Optical Engineering 30, 1590‑1600 (1991).

JA-159. K. Ismail, F. Legoues, N.H. Karam, J. Carter, and H.I. Smith, "High Quality GaAs on Sawtooth-Patterned Si Substrates", Appl. Phys. Lett. 59, 2418-2420 (1991).

JA-160. Y.C. Ku, L.-P. Ng, R. Carpenter, K. Lu, H.I. Smith, L.E. Haas, and I. Plotnik, "In-Situ Stress Monitoring and Deposition of Zero Stress W for X-ray Masks", J. Vac. Sci. Technol. B 9, 3297‑3300 (1991).

JA-161. A. Moel, W. Chu, K. Early, Y.C. Ku, E.E. Moon, F. Tsai, H.I. Smith, M.L. Schattenburg, C.D. Fung, F.W. Griffith, and L.E. Haas, "Fabrication and Characterization of High-Flatness Mesa-Etched Silicon Nitride X-ray Masks", J. Vac. Sci. Technol. B 9, 3287-3291 (1991).

JA-162. H.I. Smith, S.D. Hector, M.L. Schattenburg, and E.H. Anderson, "A New Approach to High Fidelity E-Beam Lithography Based on an In-Situ, Global Fiducial Grid", J. Vac. Sci. Technol. B 9, 2992-2995 (1991).

JA-163. E.H. Anderson, V.Boegli, M.L. Schattenburg, D.P. Kern, and H.I. Smith, "Metrology of Electron Beam Lithography Systems using Holographically Produced Reference Samples", J. Vac. Sci. Technol. B 9, 3606-3611 (1991).

JA-164. M.L. Schattenburg, K. Li, R.T. Shin, J.A. Kong, D.B. Olster, and H.I. Smith, "Electromagnetic Calculation of Soft-X-ray Diffraction from 0.1 µm Scale Gold Structures", J. Vac. Sci. Technol. B 9, 3232-3236 (1991).

JA-165. A. Kumar and P.F. Bagwell,"Evolution of the Quantized Ballistic Conductance with Increasing Disorder in Narrow-Wire Arrays", Phys. Rev. B44, 1747-1753 (1991).

JA-166. C.C. Eugster and J.A. del Alamo, "Tunneling Spectroscopy of an Electron Waveguide", Phys. Rev. Lett. 67, 3586-3589 (1991).]

JA-167. [P.L. McEuen, E.B. Foxman, U. Meirav, M.A. Kastner, Y. Meir, N.S. Wingree, and S.J. Wind, "Transport Spectroscopy of a Coulomb Island in the Quantum Hall Regime", Phys. Rev. Lett. 66, 1926-1929 (1991).]

JA-168. K.W. Rhee, A.C. Ting, L.M. Shirley, K.W. Foster, J.M. Andrews, M.C. Peckerar, and Y.C. Ku, "Patterning Tungsten Films with an Electron Beam Lithogaphy System at 50 keV for X-ray Mask Applications", J. Vac. Sci. Technol. B 9, 3292-3296 (1991).

JA-169. [U. Meirav, P.L. McEuen, M.A. Kastner, E.B. Foxman, A. Kumar, and S.J. Wind, "Conductance Oscillations and Transport Spectroscopy of a Quantum Dot", Z. Phys. B – Condensed Matter 85, 357-366 (1991).]

JA-170. W. Chu, H.I. Smith, S.A. Rishton, D.P. Kern, and M.L. Schattenburg, "Fabrication of 50 nm Line-and-Space X-ray Masks in Thick Au using a 50 keV Electron Beam System", J. Vac. Sci. Technol. B 10, 118-121 (1992).

JA-171. A. Yen, H.I. Smith, M.L. Schattenburg, and G.N. Taylor. "An Anti-Reflection Coating for use with PMMA at 193 nm", J. Electrochem. Soc., 139, 616-619 (1992).

JA-172. [C.C. Eugster, J.A. del Alamo, M.J. Rooks, M.R. Melloch, "Split-Gate Dual-Electron Waveguide Device", Appl. Phys. Lett. 5, 642-644 (1992).]

JA-173. Y. Zhao, D.C. Tsui, M. Santos, M. Shayegan, R.A. Ghanbari, D.A. Antoniadis, and H.I. Smith, "Magneto-optical Absorption in a Two Dimensional Electron Grid", Appl. Phys. Lett. 12, 1510-1512 (1992).

JA-174. A. Kumar, "Self-Consistent Calculations on Confined Electrons in Three-Dimensional Geometries", 9th Conf. on Electronic Properties of 2-D Systems, Nara, Japan, July 8-12, 91, Surface Science, 263, 335-340 (1992).

JA-175. P.F. Bagwell, S.L. Park, A. Yen, D.A. Antoniadis, H.I. Smith, T.P. Orlando, and M.A. Kastner, "Magnetotransport in Multiple Narrow Silicon Inversion Channels Opened Electrostatically into a Two-Dimensional Electron Gas", Phys. Rev. B 45, 9214-9221 (1992).

JA-176. A. Yen, M.L. Schattenburg, and H.I. Smith, "Proposed Method for Fabricating 50 nm-period Gratings by Achromatic Holographic Lithography", Applied Optics 31, 2972-2973 (1992).

JA-177. A. Yen, E.H. Anderson, R.A. Ghanbari, M.L. Schattenburg, and H.I. Smith, "Achromatic Holographic Configuration for 100 nm Period Lithography", Applied Optics 31, 4540-4545 (1992).

JA-178. [M.A. Kastner, "The Single Electron Transistor", Rev. Mod. Phys. 64, 849 (1992).]

JA-179. J.M. Carter, D.B. Olster, M.L. Schattenburg, A. Yen, and H.I. Smith, "Large-Area, Free-Standing Gratings for Atom Interferometry Produced using Holographic Lithography", J. Vac. Sci. Technol. B 10, 2909-2911 (1992).

JA-180. Y.C. Ku, M.H. Lim, J.M. Carter, M.K. Mondol, A. Moel, and H.I. Smith, "Correlation of In-Plane and Out-of-Plane Distortion in X-ray Lithography Masks", J. Vac. Sci. Technol. B 10, 3169-3172 (1992).

JA-181. S.D. Hector, M.L. Schattenburg, E.H. Anderson, W. Chu, V.V. Wong, and H.I. Smith, "Modeling and Experimental Verification of Illumination and Diffraction Effects on Image Quality in X-ray Lithography", J. Vac. Sci. Technol. B 10, 3164-3168 (1992).

JA-182. G.E. Rittenhouse, K. Early, B.S. Meyerson, H.I. Smith, and J.M. Graybeal, "Novel Vertical Silicon-Membrane Structure and Its Application to Josephson Devices", J. Vac. Sci. Technol. B 10, 2860-2863 (1992).

JA-183. W. Chu, C.C. Eugster, A. Moel, E.E. Moon, J.A. del Alamo, H.I. Smith, M.L. Schattenburg, K.W. Rhee, M.C. Peckerar, and M.R. Melloch, "Conductance Quantization in a GaAs Electron Waveguide Device Fabricated by X-ray Lithography", J. Vac. Sci. Technol. B 10, 2966-2969 (1992).

JA-184. R.A. Ghanbari, W. Chu, E.E. Moon, M. Burkhardt, K. Yee, D.A. Antoniadis, H.I. Smith, M.L. Schattenburg, K.W. Rhee, R. Bass, M.C. Peckerar, and M.R. Melloch, "Fabrication of Parallel Quasi-One-Dimensional Wires using a Novel Conformable X-ray Mask Technology", J. Vac. Sci. Technol. B 10, 3196-3199 (1992).

JA-185. R.A. Ghanbari, M. Burkhardt, D.A. Antoniadis, H.I. Smith, M.R. Melloch, K.W. Rhee, and M.C. Peckerar, "Comparative Mobility Degradation in Modulation-Doped GaAs Devices after E-beam and X-ray Irradiation", J. Vac. Sci. Technol. B 10, 2890-2892 (1992).

JA-186. K.W. Rhee, D.I. Ma, M.E. Peckerar, R.A. Ghanbari, and H.I. Smith, "Proximity Effect Reduction in X-ray Mask Making using Thin Silicon Dioxide Layers", J. Vac. Sci. Technol. B 10, 3062-3066 (1992).

JA-187. H.I. Smith, M.L. Schattenburg, "X-ray Lithography, from 500 to 30 nm: X-ray Nanolithography", IBM Journal of Research & Development 37, 319-329 (1993).

JA-188. Y. Zhao, D.C. Tsui, M. Santos and M. Shayegan, R.A. Ghanbari, D.A. Antoniadis, Henry I. Smith, and K. Kempa, "Mode Softening in the Far Infrared Excitation of Quantum Wire Arrays", Phys. Rev. B 48, 5249-5255 (1993).

JA-189. A. Moel, E.E. Moon, R. Frankel, and H.I. Smith, "Novel On-axis Interferometric Alignment Method with Sub-10 nm Precision", J. Vac. Sci. Technol. B 11, 2191-2194 (1993).

JA-190. J. Ferrera, V.V. Wong, S. Rishton, V. Boegli, E.H. Anderson, D.P. Kern, and H.I. Smith, "Spatial-Phase-Locked Electron-Beam Lithography: Initial Test Results", J. Vac. Sci. Technol. B 11, 2342-2345 (1993).

JA-191. V.V. Wong, W.-Y. Choi, J. Carter, C.G. Fonstad, and H.I. Smith, "Ridge-Waveguide Sidewall-Grating Distributed Feedback Structures Fabricated by X-ray Lithography", J. Vac. Sci. Technol. B 11, 2621-2624 (1993).

JA-192. N. Gupta, S.D. Hector, K.W. Rhee, and H.I. Smith, "Fabrication of 100 nm T-Gates for Monolithic Microwave Integrated Circuits using X-ray Lithography", J. Vac. Sci. Technol. B 11, 2625-2628 (1993).

JA-193. M.L. Schattenburg, N.A. Polce, and H.I. Smith, "Fabrication of Flip-Bonded Mesa Masks for X-ray Lithography", J. Vac. Sci. Technol. B 11, 2906-2909 (1993).

JA-194. A.W. Yanof, G.L. Zipfel, and E.E. Moon, "X-ray Mask Membrane Motion in Narrow Gap Lithography: Hydrodynamic Model and Experiment", J. Vac. Sci. Technol. B 11, 2920-2925 (1993).

JA-195. S.D. Hector, H.I. Smith, and M.L. Schattenburg, "Simultaneous Optimization of Spectrum, Spatial Coherence, Gap, Feature Bias, and Absorber Thickness in Synchrotron-Based X-ray Lithography", J. Vac. Sci. Technol. B 11, 2981-2985 (1993).

JA-196. C.O. Bozler, C.T. Harris, S.Rabe, D.D. Rathman, W.D. Goodhue, M.A. Hollis, and H.I. Smith, "Arrays of Gated Field-Emitter Cones having 0.32 µm Tip-to-Tip Spacings", J. Vac. Sci. Technol. B 12, 629-632 (1994).

JA-197. M. Burkhardt, H.I. Smith, D.A. Antoniadis, T.P. Orlando, M.R. Melloch, K.W. Rhee, and M.C. Peckerar, "Fabrication Using X-ray Nanolithography and Measurement of Coulomb Blockade in a Variable-Sized Quantum Dot", J. Vac. Sci. Technol. B 12, 3611-3613 (1994).

JA-198. I.Y. Yang, H. Hu, L.T. Su, V.V. Wong, M. Burkhardt, E. Moon, J. Carter, D.A. Antoniadis, H.I. Smith, K.W. Rhee, and W. Chu, "High Performance Self-Aligned Sub-100 nm MOSFETs Using X-ray Lithography", J. Vac. Sci. Technol. B 12, 4051-4054 (1994).

JA-199. M. Mondol, H. Li, G. Owen, and H.I. Smith, "Uniform-Stress Tungsten on X-ray Mask Membranes via He-Backside Temperature Homogenization", J. Vac. Sci. Technol. B 12, 4024-4027 (1994).

JA-200. S.D. Hector, V.V. Wong, H.I. Smith, M.A. McCord, A. Wagner, and K.W. Rhee, "Printability of sub-150 nm features in X-ray Lithography: theory and experiments", J. Vac. Sci. Technol. B 12, 3965-3969 (1994).

JA-201. V.V. Wong, J. Ferrera, J. Damask, J. Carter, E. Moon, H.A. Haus, H.I. Smith, and S. Rishton, "Spatial-Phase Locked E-Beam Lithography and X-ray Lithography for Fabricating First-Order Gratings on Rib Waveguides", J. Vac. Sci. Technol. B 12, 3741-3745 (1994).

JA-202. J.Z.Y. Guo, G.K. Celler, J.R. Maldonado, and S.D. Hector, “Wavelength Dependence of Exposure Window and Resist Profile in X-Ray Lithography”, J. Vac. Sci. Technol. B 12, 4044-4050 (1994).

JA-203. H. Hu, J.B. Jacobs, J.E. Chung, and D.A. Antoniadis, “The Correlation between Gate Current and Substrate current in 0.1 um NMOSFETs”, IEEE Elec. Dev. Lett. 11, 418 (1994).

JA-204. Y. Zhao, D.C. Tsui, M.B. Santos, M. Shayegan, R.A. Ghanbari, D.A. Antoniadis, and H.I. Smith, “Grating-Induced Cyclotron-Resonance Anomaly in GaAs/Al₁Ga_1-x As Heterostructures”, Phys. Rev. B51, 13174 (1995).

JA-205. M. Grayson, D.C. Tsui, M. Shayegan, K. Hirakawa, R.A. Ghanbari, and H. I. Smith, “Far-infrared Emission from Hot Quasi-One-Dimensional Quantum Wires in GaAs”, Appl. Phys. Lett. 67. 1564 (1995).

JA-206. T.A. Savas, S.N. Shah, M.L. Schattenburg, J.M. Carter, and H.I. Smith, "Achromatic-Interferometric Lithography for 100nm-Period Gratings and Grids", J. Vac. Sci. Technol. B 13(6), 2732-2735 (1995).

JA-207. I.Y. Yang, S. Silverman, J. Ferrera, K. Jackson, J.M. Carter, D.A. Antoniadis, and H.I. Smith,, "Combining and Matching Optical, E-beam and X-ray Lithographies in the Fabrication of Si CMOS Circuits with 0.1 and Sub-0.1µm Features", J. Vac. Sci. Technol. B 13, 2741-2744 (1995).

JA-208. R.J. Aucoin and M.L. Schattenburg, "Optically-Matched Tri-Level Resist Process for Nanostructure Fabrication", J. Vac. Sci. Technol. B 13, 3007-3011 (1995).

JA-209. E.E. Moon, P.N. Everett, and H.I. Smith, “Immunity to Signal Degradation by Overlayers Using a Novel Spatial-Phase-Matching Alignment System”, J. Vac. Sci. Technol. B 13, 2648-2652 (1995).

JA-210. V.V. Wong, J. Ferrera, J.N. Damask, T.E. Murphy, and H.I. Smith, “Distributed Bragg Grating Integrated Optical Filters; Synthesis and Fabrication”, J. Vac. Sci. Technol. B 13, 2859-2864 (1995).

JA-211. V.V. Wong, A. Yasaka, and H.I. Smith, “Resist Planarization over Topography using Ion Implantation”, J. Vac. Sci. Technol. B 13, 2797-2800 (1995).

JA-212. H.I. Smith, “100 Years of X-rays: Impact on Micro- and Nanofabrication”, J. Vac. Sci. Technol. B 13, 2323-2328 (1995).

JA-213. M.J. Rooks, R.C. Tiberio, M. Chapman, T. Hammond, E. Smith, A. Lenef, R. Rubenstein, D. Pritchard, S. Adams, J. Ferrera, J.M. Carter, and H.I. Smith, "Coherence and Structural Design of Free-Standing Gratings for Atom-Wave Optics", Japan J. Appl. Phys. 34, 6935-6939 (1995).

JA-214. H.I. Smith, “X-ray Lithography for Microelectronics”, Physics Scripta, 61, 26-31 (1996).

JA-215. H.I. Smith, M.L. Schattenburg, S.D. Hector, J. Ferrera, E.E. Moon, I.Y. Yang, and M. Burkhardt, “X-ray Nanolithography: Extension to the Limits of the Lithographic Process”, Microelectronic Engineering 32, 143-158 (1996).

JA-216. E.E. Moon, P.N. Everett, K. Rhee, and H.I. Smith, “Simultaneous Measurement of Gap and Superposition in a Precision Aligner for X-ray Nanolithography,” J. Vac. Sci. Technol. B 14, 3969-3973 (1996).

JA-217. J. Ferrera, M.L. Schattenburg, and H.I. Smith, “Analysis of Distortion in Interferometric Lithography”, J. Vac. Sci. Technol. B 14, 4009-4013 (1996).

JA-218. I.Y. Yang, D.A. Antoniadis, and H.I. Smith, “Fabrication of Back-gated CMOS Devices Using Mixed and Matched Optical and X-ray Lithographies,” J. Vac. Sci. Technol. B 14, 4024-4028 (1996).

JA-219. T.A. Savas, M.L. Schattenburg, J.M. Carter, and H.I. Smith, “Large-Area Achromatic Interferometric Lithography for 100nm-Period Gratings and Grids; With Novel Applications,” J. Vac. Sci. Technol. B 14, 4167-4170 (1996).

JA-220. H.I. Smith, “A Proposal for Maskless, Zone-Plate-Array Nanolithography,” J. Vac. Sci. Technol. B 14, 4318-4322 (1996).

JA-221. J. Damask, “Practical Design of Side-Coupled Quarter-Wave Shifted Distributed-Bragg Resonant Filters,” J. Lightwave Tech. 14(5), 812-821 (1996).

JA-222. H.I. Smith and F. Cerrina, "X-ray Lithography for ULSI manufacturing?" Microlithography World 6(1), 10-15 (1997).

JA-223. J.S. Foresi, P.R. Villeneuve, J. Ferrera, E.R. Thoen, G. Steinmeyer, S. Fan, J.D. Joannopoulos, L.C. Kimerling, H.I. Smith, E.P. Ippen, “Photonic-Band-Gap Waveguide Microcavities,” Nature, 390, 143-145, (1997).

JA-224. J. Goodberlet, J. Ferrera, and H.I. Smith, “An Analogue Delay-Locked Loop for Spatial-Phase Locking”, Electronics Letters, 33 (15) 1269-1270 (1997).

JA-225. E.M. Koontz, M.H. Lim, V.V. Wong, G.S. Petrich, L.A. Kolodziejski, H.I. Smith, K.M. Matney, G.D. U’Ren, and M.S. Goorsky, “Preservation of Rectangular-Patterned InP Gratings Overgrown by Gas Source Molecular Beam Epitaxy,” Appl. Phys. Lett. 71 (10), 1400-1402 (1997)